MEMS Malzeme Karakterizasyonu için Bütünleşik bir Elektrostatik Mikro Bükülme Test Yapısı Tasarımı ve Gerçekleştirilmesi

Authors : Ender Yıldırım, Tayfun Akın, M A Sahir Arıkan

Pages : 0-0

View : 14 | Download : 9

Publication Date : 2012-02-01

Article Type : Research Paper

Abstract :Because of the fabrication techniques, mechanical properties of the materials used in micro electromechanical systems should be determined by utilizing micro-scale test structures. In this study, a micro bending test structure, whose actuator, sample, and readout scale are integrally fabricated on a single chip is presented. Integrated fabrication of all components eliminates the alignment problem observed in similar systems. The structure relies on the principle of bending a double-clamped beam from its center by using an electrostatic comb drive. Deflection amount is determined by using image processing techniques on the read-out scale. Designed structures are fabricated by using silicon-oninsulator wafers. As a result of the tests, elastic modulus of silicon is determined as 136 GPa in accordance with the literature. 
Keywords : Micro electromechanical systems, material characterization, electrostatic actuator