GROWTH OF INGAAS/INALAS SUPERLATTICES BY MOCVD AND PRECISE THICKNESS DETERMINATION VIA HRXRD

Authors : Sezai ELAGÖZ, İlkay DEMİR

Pages : 947-951

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Publication Date : 2016-12-19

Article Type : Other Papers

Abstract :In this study, we report the growth studies of InGaAs/InAlAs superlattices insert ignore into journalissuearticles values(SLs); with thin layer thicknesses which will be used for quantum cascade laser insert ignore into journalissuearticles values(QCL); structures, grown by Metal Organic Chemical Vapor Deposition insert ignore into journalissuearticles values(MOCVD); technique.  We utilize high resolution X-ray diffraction insert ignore into journalissuearticles values(HRXRD); to determine the single layer thickness and period thicknesses of SLs. Measurement results show that by establishing very low growth rates insert ignore into journalissuearticles values(~0,1 nm/s);, the single thin layers and SLs can be grown well by MOCVD in a  controllable and repeatable way with high crystalline and interface quality.
Keywords : Superlattice, InGaAs, InAlAs, MOCVD, X ray diffraction