Structural and Optical Properties of Reactive Sputtered ZnO Thin Films on Flexible-Transparent Substrates

Authors : Nihan AKIN, Ü BAŞKÖSE, H EFKERE, S SAĞLAM, S ÇETİN, S ÖZÇELİK

Pages : 1111-1114

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Publication Date : 2014-09-16

Article Type : Research Paper

Abstract :In this work, ZnO thin films with different thickness insert ignore into journalissuearticles values(100 nm and 50 nm); were deposited onto flexible-transparent substrates by high vacuum insert ignore into journalissuearticles values(HV); reactive direct current insert ignore into journalissuearticles values(DC); magnetron sputtering technique, using oxygen as a reactive gas. The structural and optical properties of the films were investigated by X-ray diffractometer insert ignore into journalissuearticles values(XRD);, room temperature photoluminescence insert ignore into journalissuearticles values(PL); and UV–Vis spectrometer. The both obtained films had a hexagonal structure and a highly preferred orientation with the c-axis perpendicular to the substrate. The e lectronic transitions from the conduction band to the valence band insert ignore into journalissuearticles values(called as band gap); of the films was about 3.2 eV. It was observed that the exitonic transition energy of the films shifted blue emission with increasing the film thickness. In addition, the optical transmittances of the films were about 80 % in the visible region .
Keywords : ZnO, thin films, transparent, flexible, DC Sputtering