Microstructure and Mechanical Properties of TiN/TiCN/TiC Multilayer Thin Films Deposited by Magnetron Sputtering

Authors : Abbas RAZMI, Ruhi YESILDAG

Pages : 15-20

View : 18 | Download : 13

Publication Date : 2021-07-15

Article Type : Research Paper

Abstract :Enhancement of scratch and hardness mechanical properties of TiN/TiCN/TiC multilayer thin films deposited on commercially pure Titanium insert ignore into journalissuearticles values(Cp-Ti); and silicon insert ignore into journalissuearticles values(Si); substrates via magnetron sputtering technique were investigated in this study. The structural, chemical and mechanical properties of the coatings were characterized by X-ray diffraction insert ignore into journalissuearticles values(XRD);, X-ray photoelectron spectroscopy insert ignore into journalissuearticles values(XPS);, scanning electron microscopy insert ignore into journalissuearticles values(SEM);, nanoindentation and scratch tests. Results of the XRD analysis showed reflections corresponded to cubic and polycrystalline structure for TiN/TiCN/TiC films. XPS analysis of the uppermost layer of TiN/TiCN/TiC film revealed that titanium nitride and titanium carbide were formed in the coatings. According to SEM cross-sectional images, the coatings demonstrated dense structure as well as good adhesion to the substrate with a thickness of 3.035 μm. Nanoindentation hardness and critical load valueof scratch test results of TiN/TiCN/TiCmultilayer filmcoated on Cp-Ti substrate materials obtained 19.75 GPa and 21 N, respectively.
Keywords : Magnetron sputtering, TiN TiCN TiC coating, Cp Ti, Scratch, Cp Ti, Scratch, Nanoindentation