Improved MEMS microphone frequency response through design-optimization

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Journal of Smart Systems Research
Volume:4 Issue:2
Improved MEMS microphone frequency response through design-optimization

Improved MEMS microphone frequency response through design-optimization

Pages : 119-126

View : 348 | Download : 279

Publication Date : 2023-12-24

Article Type : Research Paper

Abstract :Microphone main characteristic is to faithfully detect and transform incoming acoustic signal in electric one. Semiconductor based capacitive MEMS microphones, despite their limited dimensions, offer remarkable performances (frequency response, SNR). The purpose of this article is to introduce some design optimizations in the current SDM (Sealed-Dual-Membrane) capacitive MEMS microphone mainly concerning the position of the ventilation hole. The effects of the suggested modifications on the microphone’s performances were evaluated using Lumped Model simulation tool. A clear improvement in the device frequency response within audio-band was obtained even if a less significant improvement in the general performances of microphone (SNR) was achieved.
Keywords : kapasitif MEMS mikrofon, frekans cevabı, topaklı model, havalandırma deliği, arka hacim

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