DEVELOPMENT OF AN EMBEDDED SYSTEM-BASED COLD CATHODE VACUUM MEASUREMENT SYSTEM FOR (ULTRA HIGH VACUUM) UHV APPLICATIONS

Authors : Tarık Ünler

Pages : 303-317

Doi:10.55071/ticaretfbd.1699770

View : 52 | Download : 39

Publication Date : 2025-06-30

Article Type : Research Paper

Abstract :Vacuum measurements are widely utilized in numerous critical applications including defense industries, aerospace technologies, composite material manufacturing, and various industrial processes. The key performance parameters in vacuum systems include measurement range, accuracy, and operational lifetime of the sensing elements. This study presents a comprehensive investigation of an Inverted Magnetron (IMT) cold cathode vacuum measurement sensor, which offers distinct advantages over conventional hot cathode systems, including an extended measurement range, prolonged operational lifetime, and user-friendly operation. The IMT cathode configuration demonstrates superior performance in low-pressure regimes (below 10⁻³ Torr) by optimizing electron trajectories through magnetic field confinement, thereby achieving high ionization efficiency. To optimize sensor performance, a high-stability digital electronic readout system was designed and implemented. Experimental characterization was conducted using a turbo-molecular vacuum pump, with measurement results successfully demonstrating the system\\\'s capability to accurately measure vacuum levels down to 9,9 ×10⁻⁸ Torr. These findings validate the IMT cathode design\\\'s exceptional stability and wide dynamic range in ultra-high vacuum applications. The developed flexible electronic system enables high-precision digital measurement and control of vacuum systems. This research contributes to the development of an economical, long-lifetime vacuum measurement system capable of stable operation at low-pressure regimes, based on IMT cathode technology.
Keywords : Vakum ölçümü, soğuk katot iyonizasyon sensörü, elektronik tasarım, düşük basınç ölçümü

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