Design, Modeling and Optimization of a Multilayer Thin-Film Pzt Diaphragm Used in Pressure Sensor

Authors : V Mohammadi, M H Sheikhi

Pages : 27-38

View : 9 | Download : 6

Publication Date : 2009-12-01

Article Type : Research Paper

Abstract :Multilayer thin-film PZT diaphragm has been designed and modeled. Commercial Finite element software, ANSYS was implemented to model the diaphragm. This multi-layer diaphragm can be used as both sensor and actuator. A simplified model is introduced to reduce the CPU time. Dynamic characteristics of the multilayer diaphragm have been investigated. The important parameters of the multilayer PZT diaphragm have been optimized to improve the performance of a pressure sensor using APDL macro. Some simple relation was found which can be used to predict the PZT layer characteristics in larger model with more elements
Keywords : Finite Element, ANSYS®, MEMS Pressure Sensors, Multilayer Thin Film PZT Diaphragm, Piezoelectric