The design and analysis of a novel MEMS force amplifier

Authors : Ergin KOSA, Ümit SÖNMEZ, Hüseyin KIZIL, Levent TRABZON

Pages : 253-259

Doi:10.3906/kim-1210-5

View : 14 | Download : 11

Publication Date : 0000-00-00

Article Type : Research Paper

Abstract :Compliant micromechanisms achieve high amplification of forces that can be used as a cutting force in micro- and nanofabrication. In the present study, we designed, simulated, and optimized a novel, simple micro-compliant system by SOI-MUMPs technology. The position and quasi-static analysis of a rigid body model were derived by MATLAB and simulated in ANSYS. It was found that an amplification factor of as much as 11.1 was achieved. The amplification factor increased as the micro-compliant force amplifier got closer to 0, but it decreased as the crank angle was further from 0.
Keywords : Micromechanism, compliant, force amplifier, MEMS, SOI MUMPs technology