Effect of Development Time on Polymer Phase Separation in a PMMA Resist

Authors : Mohammad Naeem KHALID, Shazia Yasin AND

Pages : 271-276

View : 19 | Download : 8

Publication Date : 0000-00-00

Article Type : Research Paper

Abstract :Developer composition type and development technique are known to influence surface and edge roughness in polymethylemethacrylate insert ignore into journalissuearticles values(PMMA);; and it is during development, we believe, that the result is most influenced by the phase separation into polymer-rich and polymer-poor regions. This polymer phase separation is more prominent in a weaker developer and low temperature. In this paper, we investigate the effect of development time on the extent of polymer phase separation in an exposed PMMA developed in a standard developer i.e. 1:3 MIBK:IPA at 20 °C and rinsed in pure IPA for 30 sec. The polymer phase separation is found to increase with the development time.
Keywords : e beam, surface roughness, PMMA, phase separation, develop time